Tuesday, May 24, 2016

Elucidating the Surface Reaction Mechanisms During Atomic Layer Deposition of LixAlySizO by in Situ Fourier Transform Infrared Spectroscopy

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The Journal of Physical Chemistry C
DOI: 10.1021/acs.jpcc.5b09212


from The Journal of Physical Chemistry C: Latest Articles (ACS Publications) http://ift.tt/25fyyiz
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