Friday, November 11, 2016

Area-Selective Atomic Layer Deposition Using an Inductively Coupled Plasma Polymerized Fluorocarbon Layer: A Case Study for Metal Oxides

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The Journal of Physical Chemistry C
DOI: 10.1021/acs.jpcc.6b09406


from The Journal of Physical Chemistry C: Latest Articles (ACS Publications) http://ift.tt/2fEXm00
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