Tuesday, August 27, 2019

[ASAP] Inhibition of Oxygen Scavenging by TiN at the TiN/SiO2 Interface by Atomic-Layer-Deposited Al2O3 Protective Interlayer

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The Journal of Physical Chemistry C
DOI: 10.1021/acs.jpcc.9b05800


from The Journal of Physical Chemistry C: Latest Articles (ACS Publications) https://ift.tt/2KXS01h
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