Tuesday, May 26, 2020

[ASAP] Reaction Mechanism of the Metal Precursor Pulse in Plasma-Enhanced Atomic Layer Deposition of Cobalt and the Role of Surface Facets

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The Journal of Physical Chemistry C
DOI: 10.1021/acs.jpcc.0c02976


from The Journal of Physical Chemistry C: Latest Articles (ACS Publications) https://ift.tt/3d3DArW
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