Thursday, September 24, 2020

[ASAP] Plasma-Enhanced Atomic Layer Deposition of Cobalt and Cobalt Nitride: What Controls the Incorporation of Nitrogen?

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The Journal of Physical Chemistry C
DOI: 10.1021/acs.jpcc.0c04223


from The Journal of Physical Chemistry C: Latest Articles (ACS Publications) https://ift.tt/2RWlXS3
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