Wednesday, September 29, 2021

[ASAP] Chemical Probing of Water-Stable Methyl Species in Atomic Layer Deposition of Al2O3 from Trimethylaluminum and Water

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The Journal of Physical Chemistry C
DOI: 10.1021/acs.jpcc.1c05889


from The Journal of Physical Chemistry C: Latest Articles (ACS Publications) https://ift.tt/39NkOVE
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