Tuesday, January 25, 2022

[ASAP] Real-Time In Situ Parallel Detection of Elements and Molecules with TOFMS during ALD for Chemical Quality Control of Thin Films

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The Journal of Physical Chemistry C
DOI: 10.1021/acs.jpcc.1c09544


from The Journal of Physical Chemistry C: Latest Articles (ACS Publications) https://ift.tt/3tZf5HB
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