Thursday, October 13, 2022

[ASAP] Role of Cyclopentadienyl Ligands of Group 4 Precursors toward High-Temperature Atomic Layer Deposition

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The Journal of Physical Chemistry C
DOI: 10.1021/acs.jpcc.2c04425


from The Journal of Physical Chemistry C: Latest Articles (ACS Publications) https://ift.tt/1aGwCWI
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