Allison M. Beese, Sourangsu Sarkar, Arun Nair, Mohammad Naraghi, Zhi An, Alexander Moravsky, Raouf O. Loutfy, Markus J. Buehler, SonBinh T. Nguyen and Horacio D. Espinosa
Bruno Ehrler, Kevin P. Musselman, Marcus L. Böhm, Frederik S. F. Morgenstern, Yana Vaynzof, Brian J. Walker, Judith L. MacManus-Driscoll and Neil C. Greenham
In this preliminary effort, a moving nano-heater directs a chemical vapor deposition reaction (nano-CVD) demonstrating a tip-based nanofabrication (TBN) method. Localized nano-CVD of copper (Cu) and copper oxide (CuO) on a silicon (Si) and silicon oxide (SiO2) substrate from gasses, namely sublima ...[Appl. Phys. Lett. 102, 133104 (2013)]published Tue Apr 02, 2013.