(author unknown)
Angelo Gaitas
In this preliminary effort, a moving nano-heater directs a chemical vapor deposition reaction (nano-CVD) demonstrating a tip-based nanofabrication (TBN) method. Localized nano-CVD of copper (Cu) and copper oxide (CuO) on a silicon (Si) and silicon oxide (SiO2) substrate from gasses, namely sublima ... [Appl. Phys. Lett. 102, 133104 (2013)] published Tue Apr 02, 2013.
Link to full article
Angelo Gaitas
In this preliminary effort, a moving nano-heater directs a chemical vapor deposition reaction (nano-CVD) demonstrating a tip-based nanofabrication (TBN) method. Localized nano-CVD of copper (Cu) and copper oxide (CuO) on a silicon (Si) and silicon oxide (SiO2) substrate from gasses, namely sublima ... [Appl. Phys. Lett. 102, 133104 (2013)] published Tue Apr 02, 2013.
Link to full article
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