Friday, October 26, 2012

Vertical etching with isolated catalysts in metal-assisted chemical etching of silicon

W. K. Choi






Nanoscale , 2012, Advance Article

DOI: 10.1039/C2NR32350H, Paper

Prayudi Lianto, Sihang Yu, Jiaxin Wu, C. V. Thompson, W. K. Choi

Stability of isolated metal catalysts for vertical metal-assisted chemical etching of silicon depends on etch chemistry and catalyst spacing.

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