Friday, July 25, 2014

The use of atomic layer deposition in advanced nanopatterning

Nanoscale , 2014, Accepted Manuscript

DOI: 10.1039/C4NR01954G, Review Article

Adriaan Jacobus Martinus Mackus, Ageeth A. Bol, Erwin Kessels

Atomic layer deposition (ALD) is a method that allows for the deposition of thin films with atomic level control of the thickness and an excellent conformality on 3-dimensional surfaces. In...

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