Brominated Chemistry for Chemical Vapor Deposition of Electronic Grade SiC
Chemistry of Materials
DOI: 10.1021/acs.chemmater.5b00074
Milan Yazdanfar, Örjan Danielsson, Emil Kalered, Pitsiri Sukkaew, Olle Kordina, Daniel Nilsson, Ivan G. Ivanov, Lars Ojamäe, Erik Janzén and Henrik Pedersen
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