In Situ Observation of Initial Stage in Dielectric Growth and Deposition of Ultrahigh Nucleation Density Dielectric on Two-Dimensional Surfaces

Nano Letters

DOI: 10.1021/acs.nanolett.5b02429

Jun Hong Park, Hema C. P. Movva, Evgeniy Chagarov, Kasra Sardashti, Harry Chou, Iljo Kwak, Kai-Ting Hu, Susan K. Fullerton-Shirey, Pabitra Choudhury, Sanjay K. Banerjee and Andrew C. Kummel
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