Thursday, October 17, 2013

HfO2 on MoS2 by Atomic Layer Deposition: Adsorption Mechanisms and Thickness Scalability

TOC Graphic


ACS Nano

DOI: 10.1021/nn404775u




Stephen McDonnell, Barry Brennan, Angelica Azcatl, Ning Lu, Hong Dong, Creighton Buie, Jiyoung Kim, Christopher L. Hinkle, Moon J. Kim and Robert M. Wallace

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