Monday, January 13, 2014

Fabrication of 10 nm-Scale Complex 3D Nanopatterns with Multiple Shapes and Components by Secondary Sputtering Phenomenon

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ACS Nano

DOI: 10.1021/nn4037688




Hwan-Jin Jeon, Hyeon Su Jeong, Yun Ho Kim, Woo-Bin Jung, Jeong Yeon Kim and Hee-Tae Jung

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