Layered nano-gratings by electron beam writing to form 3-level diffractive optical elements for 3D phase-offset holographic lithography

Nanoscale, 2015, Accepted Manuscript
DOI: 10.1039/C5NR06822C, Communication

Liang Yuan, Peter Herman
Multilevel nanophotonic structure is a major goal in providing advanced optical functionalities such as found in photonics crystals and metamaterials. A three-level nano-grating phase mask has been fabricated in electron-beam...
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