(author unknown)
Gokul Gopalakrishnan, David A. Czaplewski, and Kyle M. McElhinny et al.
Silicon nanomembranes are suspended single-crystal sheets of silicon, tens of nanometers thick, with areas in the thousands of square micrometers. Challenges in fabrication arise from buckling due to strains of over 10−3 in the silicon-on-insulator starting material. In equilibrium, the distortion ... [Appl. Phys. Lett. 102, 033113 (2013)] published Fri Jan 25, 2013.
Link to full article
Gokul Gopalakrishnan, David A. Czaplewski, and Kyle M. McElhinny et al.
Silicon nanomembranes are suspended single-crystal sheets of silicon, tens of nanometers thick, with areas in the thousands of square micrometers. Challenges in fabrication arise from buckling due to strains of over 10−3 in the silicon-on-insulator starting material. In equilibrium, the distortion ... [Appl. Phys. Lett. 102, 033113 (2013)] published Fri Jan 25, 2013.
Link to full article
No comments:
Post a Comment