Wednesday, January 02, 2013

Temperature control in thermal microactuators with applications to in-situ nanomechanical testing

(author unknown)



Qingquan Qin and Yong Zhu

Thermal microactuators are used in many micro/nano-technologies. To circumvent undesired heating of the end effector, heat sink beams are co-fabricated with the thermal actuator and connected to the substrate. This paper reports a combined experimental and modeling study on the effect of such heat ... [Appl. Phys. Lett. 102, 013101 (2013)] published Wed Jan 02, 2013.



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