We have investigated the formation of embedded nanocrystals (NCs) in SiNx using Ga+ focused-ion beam irradiation of SiNx membranes, followed by rapid thermal annealing (RTA). During irradiation, redeposition is enhanced by developing side walls, leading to enhanced near-surface [Ga] and [Si]. Subs ... [Appl. Phys. Lett. 102, 243111 (2013)] published Thu Jun 20, 2013.
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