Self-assembled Titanium Calcium Oxide Nanopatterns as versatile Reactive Nanomasks for Dry Etching Lithographic Transfer with High Selectivity

Gilles Lerondel

Nanoscale , 2012, Accepted Manuscript

DOI: 10.1039/C2NR33341D, Paper

David Grosso, Marco Faustini, Glenna Drisko, Alban A. Letailleur, Rafael Salas Montiel, Cedric Boissiere, Andrea Cattoni, Anne-Marie HAGHIRI-GOSNET, Gilles Lerondel

We report the simple preparation of ultra-thin self-assembled nanoperforated titanium calcium oxide films and their use as Reactive NanoMasks for selective dry etching of silicon. The novel reactive nanomask is...

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