Wednesday, July 31, 2013

Growth and Crystallization of TiO2 Thin Films by Atomic Layer Deposition Using a Novel Amido Guanidinate Titanium Source and Tetrakis-dimethylamido-titanium

TOC Graphic


Chemistry of Materials

DOI: 10.1021/cm303703r




Marcel Reiners, Ke Xu, Nabeel Aslam, Anjana Devi, Rainer Waser and Susanne Hoffmann-Eifert

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