Nanoscale , 2014, Accepted Manuscript
DOI: 10.1039/C4NR01874E, Paper
DOI: 10.1039/C4NR01874E, Paper
Yuan-Ming Chang, Srikanth Ravipati, Pin-Hsu Kao, Jiann Shieh, Fu-Hsiang Ko, Jenh-Yih Juang
Broadband antireflection and field emission characteristics of silicon nanopillars (Si-NPs) fabricated by self-masking dry etching in hydrogen-containing plasma were systematically investigated. In particular, the effects of ultrathin (5-20 nm) titanium...
The content of this RSS Feed (c) The Royal Society of Chemistry
Broadband antireflection and field emission characteristics of silicon nanopillars (Si-NPs) fabricated by self-masking dry etching in hydrogen-containing plasma were systematically investigated. In particular, the effects of ultrathin (5-20 nm) titanium...
The content of this RSS Feed (c) The Royal Society of Chemistry
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