Nano Letters
DOI: 10.1021/nl5013773
Vitor R. Manfrinato, Jianguo Wen, Lihua Zhang, Yujia Yang, Richard G. Hobbs, Bowen Baker, Dong Su, Dmitri Zakharov, Nestor J. Zaluzec, Dean J. Miller, Eric A. Stach and Karl K. Berggren
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Monday, June 30, 2014
Determining the Resolution Limits of Electron-Beam Lithography: Direct Measurement of the Point-Spread Function
Vitor R. Manfrinato, Jianguo Wen, Lihua Zhang, Yujia Yang, Richard G. Hobbs, Bowen Baker, Dong Su, Dmitri Zakharov, Nestor J. Zaluzec, Dean J. Miller, Eric A. Stach and Karl K. Berggren
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