Nanoscale , 2015, Accepted Manuscript
DOI: 10.1039/C5NR00900F, Paper
DOI: 10.1039/C5NR00900F, Paper
mahdi shirazi, Simon D. Elliott
Atomic layer deposition (ALD) is a technique for producing conformal layers of nanometre-scale thickness, used commercially in non-planar electronics and increasingly in other high-tech industries. ALD depends on self-limiting surface...
The content of this RSS Feed (c) The Royal Society of Chemistry
Atomic layer deposition (ALD) is a technique for producing conformal layers of nanometre-scale thickness, used commercially in non-planar electronics and increasingly in other high-tech industries. ALD depends on self-limiting surface...
The content of this RSS Feed (c) The Royal Society of Chemistry
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