Thursday, January 07, 2016

Solubility studies of inorganic-organic hybrid nanoparticle photoresists with different surface functional groups

Nanoscale, 2016, 8,1338-1343
DOI: 10.1039/C5NR07334K, Communication
Li Li, Souvik Chakrabarty, Jing Jiang, Ben Zhang, Christopher Ober, Emmanuel P. Giannelis
The solubility behavior of Hf and Zr based hybrid nanoparticles with different surface ligands in different concentrations of photoacid generator as potential EUV photoresists was investigated in detail.
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