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A. Danescu, C. Chevalier, and G. Grenet et al.
Selective etching of pre-stressed multi-layered structures releases intrinsic stresses creating flexible microscopic shapes (rolls, spirals, tubes, etc.). A question of major interest is how to control design, composition, and etching process in order to obtain a prescribed macroscopic object? We ... [Appl. Phys. Lett. 102, 123111 (2013)] published Fri Mar 29, 2013.
Link to full article
A. Danescu, C. Chevalier, and G. Grenet et al.
Selective etching of pre-stressed multi-layered structures releases intrinsic stresses creating flexible microscopic shapes (rolls, spirals, tubes, etc.). A question of major interest is how to control design, composition, and etching process in order to obtain a prescribed macroscopic object? We ... [Appl. Phys. Lett. 102, 123111 (2013)] published Fri Mar 29, 2013.
Link to full article
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