Monday, November 03, 2014

Atomic layer deposition-based tuning of the pore size in mesoporous thin films studied by in situ grazing incidence small angle X-ray scattering




Nanoscale , 2014, Advance Article

DOI: 10.1039/C4NR05049E, Paper

Jolien Dendooven, Kilian Devloo-Casier, Matthias Ide, Kathryn Grandfield, Mert Kurttepeli, Karl F. Ludwig, Sara Bals, Pascal Van Der Voort, Christophe Detavernier

In situ GISAXS allows monitoring of the change in the density and internal surface area of a mesoporous film during ALD coating.

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