Kaushik Das, Guruprasad Sosale and Srikar Vengallatore
Accurate measurements of internal friction in nanowires are required for the rational design of high- Q resonators used in nanoelectromechanical systems and for fundamental studies of nanomechanical behavior. However, measuring internal friction is challenging because of the difficulties associated with identifying the contributions of material dissipation to structural damping. Here, we present an approach for overcoming these difficulties by using a composite microresonator platform that is calibrated against the ultimate limits of thermoelastic damping. The platform consists of an array of nanowires patterned at the root of a low-loss single-crystal silicon microcantilever. The structure is processed using a lift-off technique, implemented using electron-beam lithography, to achieve excellent control over the size, alignment, dispersion and location of the nanowire array. As the first application of this platform, we measured internal friction at room temperature in alu...
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Accurate measurements of internal friction in nanowires are required for the rational design of high- Q resonators used in nanoelectromechanical systems and for fundamental studies of nanomechanical behavior. However, measuring internal friction is challenging because of the difficulties associated with identifying the contributions of material dissipation to structural damping. Here, we present an approach for overcoming these difficulties by using a composite microresonator platform that is calibrated against the ultimate limits of thermoelastic damping. The platform consists of an array of nanowires patterned at the root of a low-loss single-crystal silicon microcantilever. The structure is processed using a lift-off technique, implemented using electron-beam lithography, to achieve excellent control over the size, alignment, dispersion and location of the nanowire array. As the first application of this platform, we measured internal friction at room temperature in alu...
Link to full article
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