Friday, November 16, 2012

Generation of Charged Nanoparticles and Their Deposition Behavior under Alternating Electric Bias during Chemical Vapor Deposition of Silicon

Woong-Kyu Youn, Chan-Soo Kim, Jae-Young Lee, Sung-Soo Lee and Nong-Moon Hwang



TOC Graphic


The Journal of Physical Chemistry C

DOI: 10.1021/jp310705p






Link to full article
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