Friday, November 02, 2012

In Situ Cycle-by-Cycle Flash Annealing of Atomic Layer Deposited Materials

Michael C. Langston, Neil P. Dasgupta, Hee Joon Jung, Manca Logar, Yu Huang, Robert Sinclair and Fritz B. Prinz



TOC Graphic


The Journal of Physical Chemistry C

DOI: 10.1021/jp308895e






Link to full article
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