Friday, November 02, 2012

Super-resolution Optical Measurement of Nanoscale Photoacid Distribution in Lithographic Materials

Adam J. Berro, Andrew J. Berglund, Peter T. Carmichael, Jong Seung Kim and J. Alexander Liddle



TOC Graphic


ACS Nano

DOI: 10.1021/nn304285m






Link to full article
Posted by at

No comments:

Post a Comment

Subscribe to: Post Comments (Atom)