Low-Temperature Atomic Layer Deposition of Platinum Using (Methylcyclopentadienyl)trimethylplatinum and Ozone

The Journal of Physical Chemistry C

DOI: 10.1021/jp403455a

Jolien Dendooven, Ranjith K. Ramachandran, Kilian Devloo-Casier, Geert Rampelberg, Matthias Filez, Hilde Poelman, Guy B. Marin, Emiliano Fonda and Christophe Detavernier

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