Monday, May 25, 2015

Metal Assisted Anodic Etching of Silicon

Nanoscale, 2015, Accepted Manuscript
DOI: 10.1039/C5NR01916H, Paper
Chang Quan Lai, Wen Zheng, W K Choi, Carl V. Thompson
Metal assisted anodic etching (MAAE) of Si in HF, without H2O2, is demonstrated. Si wafers were coated with Au films, and the Au films were patterned with an array of...
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