Sputtering depends on the local surface curvature; it is higher for convex and lower for concave surfaces than for a flat reference target. We analyze this dependence theoretically and show that the sputter yield primarily depends on a dimension-free curvature parameter, and second on the relative ... [Appl. Phys. Lett. 103, 113108 (2013)] published Fri Sep 13, 2013.
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