Nanoscale , 2014, Advance Article
DOI: 10.1039/C3NR06251A, Communication
DOI: 10.1039/C3NR06251A, Communication
Byung-Hyun Lee, Dong-Il Moon, HyunJae Jang, Chang-Hoon Kim, Myeong-Lok Seol, Ji-Min Choi, Dong-Il Lee, Min-Wu Kim, Jun-Bo Yoon, Yang-Kyu Choi
This work using atomic layer deposition a dielectric with high permittivity suggests an effective operation voltage scaling for nanoelectromechanical system based switches.
To cite this article before page numbers are assigned, use the DOI form of citation above.
The content of this RSS Feed (c) The Royal Society of Chemistry
This work using atomic layer deposition a dielectric with high permittivity suggests an effective operation voltage scaling for nanoelectromechanical system based switches.
To cite this article before page numbers are assigned, use the DOI form of citation above.
The content of this RSS Feed (c) The Royal Society of Chemistry
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