Thursday, June 26, 2014

Fabrication of sub-20 nm nanopore arrays in membranes with embedded metal electrodes at wafer scales




Nanoscale , 2014, Advance Article

DOI: 10.1039/C3NR06723H, Paper

Jingwei Bai, Deqiang Wang, Sung-wook Nam, Hongbo Peng, Robert Bruce, Lynn Gignac, Markus Brink, Ernst Kratschmer, Stephen Rossnagel, Phil Waggoner, Kathleen Reuter, Chao Wang, Yann Astier, Venkat Balagurusamy, Binquan Luan, Young Kwark, Eric Joseph, Mike Guillorn, Stanislav Polonsky, Ajay Royyuru, S. Papa Rao, Gustavo Stolovitzky

We present the fabrication of sub-20 nm nanopores and nanopore arrays in membranes with embedded multilayer electrodes using CMOS semiconductor processes.

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