Rapid Atomic Layer Deposition of Silica Nanolaminates: Synergistic Catalysis of Lewis/Bronsted Acid Sites and Interfacial Interactions

Nanoscale , 2013, Accepted Manuscript

DOI: 10.1039/C3NR02086J, Paper

Guoyong Fang, Jing Ma

Rapid atomic layer deposition (RALD) has been applied to prepare various nanolaminates with the multilayer repeated structures. The possible reaction pathways for RALD of the Al2O3/SiO2 nanolaminate using trimethylaluminum (TMA)...

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