Exploring the Limits of N-Type Ultra-Shallow Junction Formation

Craig M. Polley, Warrick R. Clarke, Jill A. Miwa, Giordano Scappucci, Justin W. Wells, David L. Jaeger, Maia R. Bischof, Richard F. Reidy, Brian P. Gorman and Michelle Simmons

ACS Nano

DOI: 10.1021/nn4016407

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