Electron beam induced local crystallization of HfO2 nanopores for biosensing applications

Nanoscale , 2013, Advance Article

DOI: 10.1039/C3NR02608F, Paper

Jiwook Shim, Jose A. Rivera, Rashid Bashir

A locally crystallized nanopore is formed in mechanically and chemically stable HfO₂ membrane for advanced biosensor architectures.

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