Tuesday, August 27, 2013

Enhanced thermal stability of extreme ultraviolet multilayers by balancing diffusion-induced structural changes

S. L. Nyabero, R. W. E. van de Kruijs, and A. E. Yakshin et al.

A multilayer design that compensates period thickness compaction at elevated temperatures is presented. The design is based on a reference multilayer that exhibits compaction upon thermal loading and includes an additional sub-structure, which expands upon thermal loading to compensate for the bas ... [Appl. Phys. Lett. 103, 093105 (2013)] published Tue Aug 27, 2013.



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