Graphene Metallization of High-Stress Silicon Nitride Resonators for Electrical Integration

Nano Letters

DOI: 10.1021/nl4020414

Sunwoo Lee, Vivekananda P. Adiga, Robert A. Barton, Arend M. van der Zande, Gwan-Hyoung Lee, B. Rob Ilic, Alexander Gondarenko, Jeevak M. Parpia, Harold G. Craighead and James Hone

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