Performance enhancement of metal-oxide-semiconductor tunneling temperature sensors with nanoscale oxides by employing ultrathin Al2O3 high-k dielectrics

Nanoscale , 2013, 5,8090-8097

DOI: 10.1039/C3NR02360E, Paper

Chien-Chih Lin, Jenn-Gwo Hwu

Al₂ O₃ MOS(p) temperature sensors fabricated using the CMOS compatible and low-temperature process exhibit superior temperature sensitivity and reliable sensing abilities.

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