Friday, August 23, 2013

Size Dependent Effects in Nucleation of Ru and Ru Oxide Thin Films by Atomic Layer Deposition Measured by Synchrotron Radiation X-ray Diffraction

TOC Graphic


Chemistry of Materials

DOI: 10.1021/cm401585k




Rungthiwa Methaapanon, Scott M. Geyer, Sean Brennan and Stacey F. Bent

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