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M. Oliva, D. Michaelis, and F. Fuchs et al.
A resonance domain blazed grating, composed of an effective medium structure and a subsequent mode conversion layer, is designed, fabricated, and characterized. Due to the demanding high aspect ratio geometries, a technological approach for multilevel structures, assisted by atomic layer depositio ... [Appl. Phys. Lett. 102, 203114 (2013)] published Thu May 23, 2013.
Link to full article
M. Oliva, D. Michaelis, and F. Fuchs et al.
A resonance domain blazed grating, composed of an effective medium structure and a subsequent mode conversion layer, is designed, fabricated, and characterized. Due to the demanding high aspect ratio geometries, a technological approach for multilevel structures, assisted by atomic layer depositio ... [Appl. Phys. Lett. 102, 203114 (2013)] published Thu May 23, 2013.
Link to full article
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